MS2101AA-M00 | MEMS Capacitive Airflow Sensor | HOTCHIP

MS2101AA-M00 MEMS capacitive airflow sensor uses patented multi-stage diaphragm technology for stable negative pressure triggering and excellent ASIC compatibility.

Key Features
Capacitive output signal
Bottom airflow sensing
Patented diaphragm MEMS structure
Anti oil-film design
Stable pressure triggering
Applications
Electronic cigarettes
Medical devices
Pressure sensing applications